Application

17979129 · Apparatus And Tuning Method For Mitigating RF Load Impedance Variations Due To Periodic Disturbances

Filed 2022-11-02 · Granted · Patent 12183549 (2024-12-31) The official file ↗The patent and its PDF ↗ · Art unit 2844 · Examiner Henry T Luong Typical · CPC H01J 37/32155 · MKS Instruments, Inc. · HARNESS DICKEY (DETROIT)

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

21.6 mo

to disposition 26.0 mo

Statutes raised

0 actions read

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