PATLY.AIApplication
18000635 · REMOVABLE SHOWERHEAD FACEPLATE FOR SEMICONDUCTOR PROCESSING TOOLS
Filed 2022-12-02 · Granted · Patent 12435418 (2025-10-07) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Rudy Zervigon Easy · CPC C23C 16/45565 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL
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