Application

18011103 · ANODIZATION FOR METAL MATRIX COMPOSITE SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS

Filed 2022-12-16 · Granted · Patent 12666926 (2026-06-23) The official file ↗The patent and its PDF ↗ · Art unit 1787 · Examiner Cheng Yuan Huang Typical · CPC H10P 72/7616 · Lam Research Corporation · Beyer Law Group LLP/Lam

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

30.0 mo

to disposition 42.2 mo

Statutes raised

102 103 112

1 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.