Application

18011465 · PROFILE OPTIMIZATION FOR HIGH ASPECT RATIO MEMORY USING AN ETCH FRONT METAL CATALYST

Filed 2022-12-19 · Granted · Patent 12406852 (2025-09-02) The official file ↗The patent and its PDF ↗ · Art unit 1713 · Examiner Andrew Keelan Laobak Typical · CPC H10P 50/283 · Lam Research Corporation · Beyer Law Group LLP/Lam

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

25.0 mo

to disposition 32.5 mo

Statutes raised

112

1 actions read

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