Application

18011593 · APPARATUS FOR AND METHOD OF ACCELERATING DROPLETS IN A DROPLET GENERATOR FOR AN EUV SOURCE

Filed 2022-12-20 · Granted The official file ↗ · Art unit 2878 · Examiner Hanway Chang Typical · CPC H05G 2/0023 · ASML Netherlands B.V. · ASML Other DMIPG

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

29.5 mo

to disposition 44.4 mo

Statutes raised

102 103 112

3 actions read

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