Application

18012194 · IN-SITU HYDROCARBON-BASED LAYER FOR NON-CONFORMAL PASSIVATION OF PARTIALLY ETCHED STRUCTURES

Filed 2022-12-21 · Pending The official file ↗ · Art unit 1713 · Examiner Andrew Keelan Laobak Typical · CPC H10P 50/286 · Lam Research Corporation · Beyer Law Group LLP/Lam

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

23.0 mo

to disposition n/a

Statutes raised

102 103

5 actions read

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