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18012224 · AUTOMATED SHOWERHEAD TILT ADJUSTMENT

Filed 2022-12-21 · Granted · Patent 12410519 (2025-09-09) The official file ↗The patent and its PDF ↗ · Art unit 1717 · Examiner Hai Y Zhang Typical · CPC C23C 16/45565 · Lam Research Corporation · SLW / Lam Research Corporation

Office actions
1
first was Restriction requirement
RCEs
0
no appeal
To first action
17.8 mo
to disposition 32.6 mo
Statutes raised
103
1 actions read
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