Application

18013768 · SUBSTRATE SUPPORT WITH UNIFORM TEMPERATURE ACROSS A SUBSTRATE

Filed 2022-12-29 · Pending The official file ↗ · Art unit 2817 · Examiner Kimberly Newman Frey Hard · CPC H10P 72/7624 · LAM RESEARCH CORPORATION · Harness, Dickey & Pierce, P.L.C. (Lam)

Office actions

first was Non-final rejection

RCEs

appealed

To first action

29.6 mo

to disposition n/a

Statutes raised

102 103

3 actions read

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