Application

18015155 · SYSTEM AND METHOD FOR CONDITIONING OPTICAL APPARATUSES

Filed 2023-01-09 · Granted · Patent 12681393 (2026-07-14) The official file ↗The patent and its PDF ↗ · Art unit 1737 · Examiner Chanceity N Robinson Typical · CPC G03F 7/70633 · ASML Netherlands B.V. · Finnegan/ASML

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

30.0 mo

to disposition 42.1 mo

Statutes raised

103 112

2 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.