Application
18050300 · SUBSTRATE PROCESSING APPARATUS
Filed 2022-10-27 · Granted · Patent 12206342 (2025-01-21) The official file ↗The patent and its PDF ↗ · Art unit 2836 · Examiner Stephen W Jackson Easy · CPC H10P 72/0456 · Brooks Automation US, LLC. · Perman & Green, LLP
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
19.0 mo
to disposition 26.8 mo
Statutes raised
DP
1 actions read