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18072711 · METHODS OF USING A SEGMENTED SHOWERHEAD FOR UNIFORM DELIVERY OF MULTIPLE PRE-CURSORS

Filed 2022-12-01 · Granted · Patent 12043895 (2024-07-23) The official file ↗The patent and its PDF ↗ · Art unit 1715 · Examiner Bret P Chen Easy · CPC H10P 72/0402 · APPLIED MATERIALS, INC. · Moser Taboada / Applied Materials, Inc.

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
9.3 mo
to disposition 19.7 mo
Statutes raised
103
1 actions read
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