Application

18076375 · REDUCTION OR ELIMINATION OF PATTERN PLACEMENT ERROR IN METROLOGY MEASUREMENTS

Filed 2022-12-06 · Granted · Patent 12013634 (2024-06-18) The official file ↗The patent and its PDF ↗ · Art unit 2851 · Examiner Mohammed Alam Typical · CPC G03F 1/44 · KLA-TENCOR CORPORATION · KLA Corporation / Hodgson Russ LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

10.4 mo

to disposition 18.4 mo

Statutes raised

1 actions read

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