Application

18087320 · LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Filed 2022-12-22 · Granted · Patent 12117721 (2024-10-15) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Mesfin T Asfaw Typical · CPC G03B 27/42 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.8 mo

to disposition 21.8 mo

Statutes raised

102

1 actions read

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