Application
18095053 · BOTTOM FED SUBLIMATION BED FOR HIGH SATURATION EFFICIENCY IN SEMICONDUCTOR APPLICATIONS
Filed 2023-01-10 · Granted · Patent 11773485 (2023-10-03) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Rudy Zervigon Easy · CPC C23C 16/4481 · Applied Materials, Inc. · SERVILLA WHITNEY LLC/AMT
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