Application

18101072 · PROTECTIVE COATING FOR PLASMA DICING

Filed 2023-01-24 · Granted · Patent 11908741 (2024-02-20) The official file ↗The patent and its PDF ↗ · Art unit 2823 · Examiner Vu A Vu Easy · CPC H01L 21/78 · Plasma-Therm LLC · HARVEY S. KAUGET

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

8.3 mo

to disposition 12.9 mo

Statutes raised

103 DP

1 actions read

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