Application

18105948 · METHOD AND APPARATUS FOR ETCHING A LITHOGRAPHY MASK

Filed 2023-02-06 · Granted The official file ↗ · Art unit 1713 · Examiner Christopher Remavege Hard · CPC G03F 1/24 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

29.9 mo

to disposition 43.3 mo

Statutes raised

102 103 112

1 actions read

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