PATLY.AIApplication
18117183 · PROCESS FOR PREPARING SILICON-RICH SILICON NITRIDE FILMS
Filed 2023-03-03 · Granted The official file ↗ · Art unit 2891 · Examiner Asok K Sarkar Easy · CPC H10P 14/6682 · ENTEGRIS, INC. · ENTEGRIS, INC./OC
Office actions
2
first was Restriction requirement
RCEs
1
no appeal
To first action
27.3 mo
to disposition 37.8 mo
Statutes raised
103
2 actions read