Application

18124171 · METHOD AND APPARATUS FOR MASK REPAIR

Filed 2023-03-21 · Pending The official file ↗ · Art unit 1737 · Examiner Martin J Angebranndt Hard · CPC G03F 1/22 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

39.1 mo

to disposition n/a

Statutes raised

102 103 112

2 actions read

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