Application

18134802 · CHALCOGEN PRECURSORS FOR DEPOSITION OF SILICON NITRIDE

Filed 2023-04-14 · Granted · Patent 12142477 (2024-11-12) The official file ↗The patent and its PDF ↗ · Art unit 2891 · Examiner Asok K Sarkar Easy · CPC C23C 16/345 · National University of Singapore · SERVILLA WHITNEY LLC/AMT

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.2 mo

to disposition 19.0 mo

Statutes raised

102 103 DP

2 actions read

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