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18136708 · METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER

Filed 2023-04-19 · Abandoned The official file ↗ · Art unit 2893 · Examiner Victor V Barzykin Typical · CPC H10P 54/00 · Plasma-Therm LLC · HARVEY S. KAUGET

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
25.8 mo
to disposition 34.2 mo
Statutes raised
102 103 112 DP
1 actions read
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