Application

18176316 · OSCILLATING SECONDARY STAGE FOR FRAME-MODE OVERLAY METROLOGY

Filed 2023-02-28 · Granted · Patent 12327741 (2025-06-10) The official file ↗The patent and its PDF ↗ · Art unit 3726 · Examiner Amanda J Kreiling Easy · CPC H10P 72/7618 · KLA Corporation · Kwan & Olynick LLP -- KLA

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

23.9 mo

to disposition 27.4 mo

Statutes raised

0 actions read

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