Application

18199871 · SYSTEM FOR STORING WAFER AND SYSTEM FOR MONITORING POLLUTION OF WAFER

Filed 2023-05-19 · Granted · Patent 12701954 (2026-08-04) The official file ↗The patent and its PDF ↗ · Art unit 2897 · Examiner Mohammed Shamsuzzaman Typical · CPC H10P 72/0602 · FOXSEMICON INTEGRATED TECHNOLOGY, INC. · ScienBiziP, PC

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

30.8 mo

to disposition 38.5 mo

Statutes raised

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