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18206910 · SYSTEM AND METHOD FOR INTRODUCING ALUMINUM TO AN ION SOURCE

Filed 2023-06-07 · Granted · Patent 11996281 (2024-05-28) The official file ↗The patent and its PDF ↗ · Art unit 2875 · Examiner Anne M Hines Easy · CPC H01J 1/20 · Applied Materials, Inc. · Nields, Lemack & Frame, LLC - Varian

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
6.0 mo
to disposition 11.7 mo
Statutes raised
·
1 actions read
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