Application

18212049 · GRATING-OVER-GRATING OVERLAY MEASUREMENT WITH PARALLEL COLOR PER LAYER

Filed 2023-06-20 · Granted · Patent 12399435 (2025-08-26) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Clark David Hovis · CPC G03F 7/70633 · KLA Corporation · Suiter Swantz/KLA Joint Customer Number

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

22.3 mo

to disposition 26.2 mo

Statutes raised

0 actions read

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