Application

18229984 · METHOD OF DETERMINING CONTROL PARAMETERS OF A DEVICE MANUFACTURING PROCESS

Filed 2023-08-03 · Granted · Patent 12197136 (2025-01-14) The official file ↗The patent and its PDF ↗ · Art unit 2851 · Examiner Phallaka Kik Easy · CPC G03F 7/70525 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.3 mo

to disposition 17.4 mo

Statutes raised

1 actions read

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