Application

18254466 · MEASURING DEVICE AND METHOD FOR MEASURING PARAMETERS OF A PIEZOELECTRIC CRYSTAL ONTO WHICH A THIN FILM OF MATERIAL IS DEPOSITED AS WELL AS THIN-FILM DEPOSITION SYSTEMS WITH SUCH A DEVICE AND A METHOD FOR CONTROLLING SUCH SYSTEMS

Filed 2023-05-25 · Granted · Patent 12493016 (2025-12-09) The official file ↗The patent and its PDF ↗ · Art unit 2849 · Examiner Jeffrey M Shin Easy · CPC G01N 29/12 · EVATEC AG · McDonald Hopkins LLC

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

18.8 mo

to disposition 30.5 mo

Statutes raised

112

1 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.