Application

18291818 · METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT, EXTREME ULTRAVIOLET LIGHT SOURCE ASSEMBLY AND OPTICAL SYSTEM

Filed 2024-01-24 · Granted · Patent 12641704 (2026-05-26) The official file ↗The patent and its PDF ↗ · Art unit 2884 · Examiner Mark R Gaworecki Easy · CPC H05H 1/10 · Shaanxi Startorus Fusion Technology Company Limited · Woods Oviatt Gilman LLP

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

24.0 mo

to disposition 28.0 mo

Statutes raised

0 actions read

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