Application

18302141 · Enhanced Tuning Methods for Mitigating RF Load Impedance Variations Due to Periodic Disturbances

Filed 2023-04-18 · Granted · Patent 12278090 (2025-04-15) The official file ↗The patent and its PDF ↗ · Art unit 2844 · Examiner Jimmy T Vu Easy · CPC H01J 37/32128 · MKS Instruments, Inc. · Harness | MKS

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

20.5 mo

to disposition 23.9 mo

Statutes raised

0 actions read

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