Application
18351681 · PLASMA-ENHANCED DEPOSITION OF FILM STACKS
Filed 2023-07-13 · Granted · Patent 12385138 (2025-08-12) The official file ↗The patent and its PDF ↗ · Art unit 1715 · Examiner Bret P Chen Easy · CPC H10P 14/6336 · Novellus Systems, Inc. · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
17.1 mo
to disposition 25.0 mo
Statutes raised
103 DP
1 actions read