Application

18361024 · ION IMPLANTATION SYSTEM AND METHOD FOR IMPLANTING ALUMINUM USING NON-FLUORINE-CONTAINING HALIDE SPECIES OR MOLECULES

Filed 2023-07-28 · Granted · Patent 12497687 (2025-12-16) The official file ↗The patent and its PDF ↗ · Art unit 1712 · Examiner Michael P Wieczorek Typical · CPC C23C 14/48 · Axcelis Technologies, Inc. · Eschweiler & Potashnik, LLC (Axcelis)

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

15.1 mo

to disposition 28.6 mo

Statutes raised

102 103 112

2 actions read

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