Application

18362429 · MAGNETIC FOCUSING DEVICE LOW ENERGY ION BEAMS

Filed 2023-07-31 · Granted The official file ↗ · Art unit 2878 · Examiner Hanway Chang Typical · CPC H01J 37/141 · Axcelis Technologies, Inc. · Eschweiler & Potashnik, LLC (Axcelis)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

26.9 mo

to disposition 37.7 mo

Statutes raised

102 103

2 actions read

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