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18378111 · CHEMICAL-MECHANICAL POLISHING COMPOSITION FOR HEAVILY-DOPED BORON SILICON FILMS

Filed 2023-10-09 · Pending The official file ↗ · Art unit 1713 · Examiner Shamim Ahmed Typical · CPC C09G 1/02 · CMC Materials LLC · Thomas Omholt

Office actions
3
first was Non-final rejection
RCEs
1
no appeal
To first action
18.8 mo
to disposition n/a
Statutes raised
103 112
3 actions read
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