Application

18413947 · WAFER HOLDER DEVICE HAVING HEATING FUNCTION

Filed 2024-01-16 · Granted · Patent 12740365 (2026-09-15) The official file ↗The patent and its PDF ↗ · Art unit 3726 · Examiner Jason L Vaughan Easy · CPC H10P 72/78 · SKY TECH INC. · HDLS IPR SERVICES

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

24.0 mo

to disposition 32.0 mo

Statutes raised

102 103

1 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.