Application
18427610 · SYSTEMS AND METHODS FOR IN-SITU ETCHING PRIOR TO PHYSICAL VAPOR DEPOSITION IN THE SAME CHAMBER
Filed 2024-01-30 · Abandoned The official file ↗ · Art unit 1794 · Examiner Michael A Band Hard · CPC C23C 14/022 · OEM Group, LLC · HARVEY S. KAUGET
Office actions
2
first was Non-final rejection
RCEs
0
no appeal
To first action
21.4 mo
to disposition 30.6 mo
Statutes raised
102 103 112
1 actions read