Application

18453594 · SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER

Filed 2023-08-22 · Granted · Patent 12353139 (2025-07-08) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Peter B Kim Typical · CPC G03F 7/70341 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

9.7 mo

to disposition 22.5 mo

Statutes raised

103 112 DP

2 actions read

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