Application

18481492 · FILM FORMING METHOD AND FILM FORMING APPARATUS

Filed 2023-10-05 · Granted · Patent 12740349 (2026-09-15) The official file ↗The patent and its PDF ↗ · Art unit 2893 · Examiner Edward Chin Typical · CPC H10P 14/3806 · Tokyo Electron Limited · IPUSA, P.L.L.C

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

26.6 mo

to disposition 35.4 mo

Statutes raised

102

1 actions read

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