Application
18508177 · MACHINE AND DEEP LEARNING METHODS FOR SPECTRA-BASED METROLOGY AND PROCESS CONTROL
Filed 2023-11-13 · Granted · Patent 12321102 (2025-06-03) The official file ↗The patent and its PDF ↗ · Art unit 2116 · Examiner Yuhui R Pan Typical · CPC H10P 74/23 · NOVA LTD. · RECHES PATENTS
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
8.9 mo
to disposition 18.7 mo
Statutes raised
103 112 DP
1 actions read