Application

18510628 · MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

Filed 2023-11-15 · Granted · Patent 12559362 (2026-02-24) The official file ↗The patent and its PDF ↗ · Art unit 2813 · Examiner Sun Mi Kim King Hard · CPC B81B 3/0081 · Taiwan Semiconductor Manufacturing Company, Ltd. · Studebaker Brackett PLLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

16.2 mo

to disposition 27.3 mo

Statutes raised

112

1 actions read

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