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18524801 · Method of Using and Fabricating a Nanoimprint Template with a Mesa Sidewall Coating

Filed 2023-11-30 · Pending The official file ↗ · Art unit 1722 · Examiner Anca Eoff Typical · CPC G03F 7/0002 · CANON KABUSHIKI KAISHA · CANON NANOTECHNOLOGIES, INC.

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first was Restriction requirement
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