Application

18525636 · FORMULATIONS TO SELECTIVELY ETCH SILICON-GERMANIUM RELATIVE TO SILICON

Filed 2023-11-30 · Granted · Patent 12300498 (2025-05-13) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Allan W Olsen Easy · CPC H10P 50/642 · ENTEGRIS, INC. · ENTEGRIS, INC./OC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

10.0 mo

to disposition 17.4 mo

Statutes raised

103

1 actions read

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