Application

18587281 · METHOD AND APPARATUS FOR IMPEDANCE MATCHING IN A POWER DELIVERY SYSTEM FOR REMOTE PLASMA GENERATION

Filed 2024-02-26 · Granted · Patent 12289820 (2025-04-29) The official file ↗The patent and its PDF ↗ · Art unit 2844 · Examiner Srinivas Sathiraju Typical · CPC H05H 1/463 · MKS Instruments, Inc. · MKS Inc.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

10.5 mo

to disposition 14.1 mo

Statutes raised

1 actions read

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