Application

18611156 · CLEANING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND CLEANING METHOD

Filed 2024-03-20 · Pending The official file ↗ · Art unit 1711 · Examiner Lauren Grace Orta Typical · CPC H10P 70/20 · EBARA CORPORATION · BakerHostetler

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

22.1 mo

to disposition n/a

Statutes raised

102 103 112

2 actions read

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