Application

18612515 · APPARATUS AND METHOD FOR ANALYZING AN ELEMENT OF A PHOTOLITHOGRAPHY PROCESS WITH THE AID OF A TRANSFORMATION MODEL

Filed 2024-03-21 · Pending The official file ↗ · Art unit 2857 · Examiner Lynda Dinh Hard · CPC G03F 1/72 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.9 mo

to disposition n/a

Statutes raised

101 102 103 112

3 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.