Application

18612809 · PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUBSTRATE

Filed 2024-03-21 · Pending The official file ↗ · Art unit 1718 · Examiner Gordon Baldwin Typical · CPC H10P 72/0402 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

24.5 mo

to disposition n/a

Statutes raised

103 112 DP

1 actions read

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