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18621600 · Monitoring Radical Particle Concentration Using Mass Spectrometry

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Filed 2024-03-29 · Granted · Patent 12265057 (2025-04-01) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Hsien C Tsai Typical · CPC G01N 27/623 · MKS Instruments, Inc. · MKS Inc.

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first was Notice of allowance
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to disposition 12.1 mo
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