Application

18635589 · SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER

Filed 2024-04-15 · Granted · Patent 12366808 (2025-07-22) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/70341 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

7.7 mo

to disposition 15.2 mo

Statutes raised

1 actions read

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