Application
18648513 · METHOD FOR FORMING SEMICONDUCTOR-ON-INSULATOR (SOI) SUBSTRATE AND RECYCLE SUBSTRATE
Filed 2024-04-29 · Granted · Patent 12557391 (2026-02-17) The official file ↗The patent and its PDF ↗ · Art unit 2892 · Examiner Bruce Robert Smith III Typical · CPC H10D 87/00 · TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. · WPAT, PC
Office actions
2
first was Non-final rejection
RCEs
1
no appeal
To first action
7.5 mo
to disposition 21.7 mo
Statutes raised
102 103
2 actions read