Application

18653555 · SYSTEM TO INSPECT, MODIFY OR ANALYZE A REGION OF INTEREST OF A SAMPLE BY CHARGED PARTICLES, SET OF SYSTEMS TO INSPECT, MODIFY OR ANALYZE A REGION OF INTEREST OF A SAMPLE AND METHOD TO INSPECT, MODIFY OR ANALYZE A REGION OF INTEREST OF A SAMPLE BY CHARGED PARTICLES

Filed 2024-05-02 · Granted · Patent 12270774 (2025-04-08) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Hsien C Tsai Typical · CPC G01N 23/2251 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)