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18658399 · CARBON-CONTAINING DIFFUSION BARRIER LAYER FOR PROTECTION OF CNT EUV PELLICLE

Filed 2024-05-08 · Pending The official file ↗ · Art unit 1737 · Examiner Alexander N Lee Typical · CPC G03F 1/24 · Taiwan Semiconductor Manufacturing Company, Ltd. · SEED INTELLECTUAL PROPERTY LAW GROUP LLP

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