Application

18671891 · DETECTING WAFER STATUS IN A WAFER CHUCK ASSEMBLY

Filed 2024-05-22 · Granted · Patent 12424480 (2025-09-23) The official file ↗The patent and its PDF ↗ · Art unit 3722 · Examiner Eric Daniel Whitmire Hard · CPC H10P 72/78 · Lam Research Corporation · SLW / Lam Research Corporation

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

8.8 mo

to disposition 16.1 mo

Statutes raised

112 DP

1 actions read

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